According to an announcement from Shanghai On-chip Micro-Device Technology Co., Ltd. (referred to as "On-chip Micro-Device" or "AMIES"), the company held a delivery ceremony for its 500th stepper lithography machine yesterday, which marked a new level for my country's high-end semiconductor equipment industry.
On-chip micro-assembly said that the advanced packaging lithography machine is AMIES's flagship product. It has significant features such as high resolution, high overlay accuracy, and ultra-large exposure field of view. It has powerful warping and thick glue processing capabilities, and can flexibly configure equipment according to customers' specific process needs.
This type of product can meet the requirements of advanced packaging technologies such as Flip-chip, Fan-in, Fan-out WLP/PLP, 2.5D/3D, etc., and has been highly recognized by the market. The current global market share has reached 35%, and the domestic market share has reached 90%.
The 500th stepper lithography machine shipped this time will be delivered to Shenghejing Micro Semiconductor (Jiangyin) Co., Ltd. Shenghe Jingwei and AMIES have a good foundation for cooperation. Shenghe Jingwei expressed its willingness to further deepen its strategic cooperation with AMIES and jointly promote advanced packaging technology innovation and industrial development.
According to the data, Chip-on-chip Micro-Device was established on February 8, 2025. It is an innovative technology enterprise focusing on the research and development, production and service of high-end semiconductor equipment. The company is committed to providing high-precision, high-performance, and high-reliability equipment and solutions for application fields such as IC front-end chip manufacturing, wafer-level/board-level advanced packaging, compound semiconductors, and new displays.
What exactly is a stepper lithography machine (consisting of three parts: workpiece table, mask table and focusing and leveling system)? It is actually a high-precision projection exposure device (an indispensable core equipment) for integrated circuit manufacturing, a semiconductor manufacturing equipment that achieves high-resolution pattern transfer through stepper lithography technology. Its core function is to project the mask pattern onto the wafer surface field by field.
The optical system of the stepper lithography machine, as the key to its technology, covers multiple core components such as the lighting system, projection objective lens, and mask. The optical system includes illumination, projection objectives and reticle, supporting the high resolution and performance of the lithography machine.
