Samsung Electronics is developing its own "smart sensor system" for the control and management of semiconductor processes. This new technology is expected to improve semiconductor yield and increase productivity. According to ETNews, Samsung Electronics has begun internal research and development of smart sensor systems, which are expected to be used in autonomous driving and artificial intelligence semiconductor manufacturing processes in the future. The project is understood to be ongoing in collaboration with relevant partners and academia.

Accurately measuring and managing plasma conditions is considered one of the important tasks in the semiconductor production process, because only by accurately controlling the uniformity and density of plasma during the semiconductor manufacturing process can semiconductor yields be improved and yields ensured.

The "smart sensor system" can be used to measure wafer plasma uniformity, accurately measure and manage the process performance of etching, deposition and cleaning,It is expected to increase production capacity.

the companyMost of the existing wafer smart sensors are purchased from foreign manufacturers, which costs a lot of money. And recently, given the soaring demand for increased output and productivity,Samsung chose to turn to in-house research and development to reduce its reliance on foreign sensors.

In addition, the smart sensors being developed by Samsung Electronics are said to be ultra-small and will not have much impact on existing equipment space. This means alsoCan improve space utilization.

Samsung Electronics also plans toGradually expand the development and application scope of smart sensors. The aim is to develop smart sensors and systems that can be used in a variety of semiconductor processes, not limited to plasmas.

The above move is Samsung’s attempt to build an intelligent semiconductor production system.Perhaps an “artificial intelligence fab” will eventually be realized.